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3064 Kenneth Street Santa Clara, CA 95054 |
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To contact us: |
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Phone: 408-855-8686 Email: info@agsplasma.com |
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AGS Plasma Systems, Inc. |
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AGS Plasma Systems, Inc. |
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Transforming Technology into Affordable Solutions |
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New systems for R&D and production. RIE, Triode, PECVD, or ICP/HDP configurations are available based on an innovative modular plasma platform. The range of MPS models is also aimed at solving the low-volume research, development, and analytical user's needs. Our MPS-150™ was introduced to meet the unique demands of 2-6" compound semiconductor manufacturing. Our MPS-200™ and MPS-300™ Series high performance plasma tool is used in a variety of demanding applications. The MPS is also available as an OEM module. These systems are being used today for semiconductor research and manufacturing, MEMS, Solar & PV, LED's and Laser diodes, nanotechnology, superconductivity and plasma studies, waveguide manufacture, failure analysis, and CVD of materials ranging from dielectrics to diamond films. Recent introductions to the product mix include the MPS-450-RIE/CVD™ as well as the new bench-top TT-150-RIE/CVD family. Now, 2016 ushers in two new product families to the versatile AGSP line of plasma processors: Korvus Hex PVD and Relyon plasma’s Atmospheric Plasma Torches. This versatile parallel plate plasma tool was based on the very successful design once built by Ion & Plasma Equipment. It remains the most rugged, reliable, and low cost plasma system you can buy. AGS offers the Modular Process System™ , or MPS™, for solving any of your plasma processing requirements with even greater reliability and the best uptime in the industry. These affordable plasma systems are now available in the following configurations: |
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Plasma Systems |
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MPS-XX0-PVD — Physical Vapor Deposition tool |
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Using our standard MPS platform, this Inductively Coupled Plasma (ICP) tool can be helpful where high etch rates and low damage are required. AGS utilizes a compact, self contained, economical HDP plasma source. |
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MPS-XX0-HDP — High Density Plasma tool |
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Advanced systems for use with toxic or corrosive gases or when contamination must be eliminated from your process. |
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MPS-XX0L-Loadlock — Toxic/Corrosive compatible |
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MPS-XX0PL-Plasma Locus™— Cluster tool versions of our RIE, PECVD, PVD, and HDP tools |
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MPS-150-CVD
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MPS-200L-RIE
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MPS-300L-RIE OEM
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NEW! Relyon plasma GmbH™—Atmospheric Plasma Torches
The PZ2 is an innovative portable Cold Atmospheric Pressure Plasma handheld device that is ideal for treating materials that would be damaged by the higher temperature conventional atmospheric plasma system. This low cost handheld Cold Plasma unit operates without the need for an external gas supply and places minimum stress on the material being treated. Flexible and easy to use, it is perfect for workshops, laboratories, education facilities and during operations in the field.
The PB3/PS2000 is a more powerful high performance atmospheric plasma system in a robust industrial design. Easy integration into industrial processes and ability to communicate were at the focus throughout the entire development of this universally applicable plasma unit. |
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NEW! Korvus Technology— HEX™ Series—Modular Deposition System
The HEX series is a compact and highly flexible range of deposition systems which allow the user complete freedom to reconfigure the equipment to suit their current experimental needs or for a future change of direction. The system can be purchased at the most basic level and later upgraded to a sophisticated deposition and analysis tool as funds allow. All upgrades are designed to be simple for users to implement, cutting down on unnecessary installation expense.
Available sources include Sputter, E-Beam , Low Temperature Organic and Thermal Evaporation. Options available such as; quartz crystal monitoring, high vacuum load locks and heated, cooled, rotating or static sample stages. |
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MPS-XX0-RIE — Reactive Ion Etcher
The classic, high performance, value priced, RIE plasma tool used throughout the world for over ten years - and still going strong. |
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MPS-XX0-PECVD — Plasma Enhanced Deposition tool
A versatile multi-process PECVD tool with flexible controls and excellent uniformity - all for low price. |
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TT-150-RIE/CVD |