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3064 Kenneth Street Santa Clara, CA 95054 |
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Phone: 408-855-8686 Email: info@agsplasma.com |
AGS Plasma Systems, Inc. |
AGS Plasma Systems, Inc. |
Transforming Technology into Affordable Solutions |
Etch Product Detail |
The classic, high performance, value priced, RIE plasma tool used throughout the world for over ten years - and still going strong! This system is your best bet when you have a variety of demanding applications. The MPS-RIE is great for day-to-day use at the push of a button. |
Product Summary |
MPS-RIE Features
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· Best built R&D or low volume production tool available · Si, SiO2, SiNx, Metals, TiW, GaAs, resist, ILD and polyimide, micromachining (MEMS), photonics, HTSC's, and for failure analysis · Accepts any size substrate from 1" to 12" wafers, flat panels, or custom packages · Easy to use and simple to service · Safe, rugged design means high reliability with remarkable uptime · Simple 5 piece chamber construction is versatile and easy to upgrade
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Delivery: 90 days ARO |
MPS-200-RIE — Reactive Ion Etcher |
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