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3064 Kenneth Street Santa Clara, CA 95054 |
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Phone: 408-855-8686 Email: info@agsplasma.com |
AGS Plasma Systems, Inc. |
AGS Plasma Systems, Inc. |
Transforming Technology into Affordable Solutions |
HDP Product Detail |
Using our standard MPS platform, this Inductively Coupled Plasma (ICP) tool can be helpful where high etch rates and low damage are required. AGS utilizes a compact, self contained, economical HDP plasma source. |
Product Summary |
MPS-ICP Features
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· Target focusing electromagnets fine tune process uniformity
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Delivery: 90 days ARO |
MPS-300-ICP — High Density Plasma |
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