3064 Kenneth Street

Santa Clara, CA  95054

To contact us:

Phone: 408-855-8686

Email: info@agsplasma.com

AGS Plasma Systems, Inc.

New systems for R&D and production. RIE, Triode, PECVD, or ICP/HDP configurations are available based on an innovative modular plasma platform. The range of MPS models is also aimed at solving the low-volume research, development, and analytical user's needs. Our MPS-150™ was introduced to meet the unique demands of 2-6" compound semiconductor manufacturing. Our MPS-200™ and MPS-300™ Series high performance plasma tool is used in a variety of demanding applications. The MPS is also available as an OEM module. These systems are being used today for semiconductor research and manufacturing, MEMS, Solar & PV, LED's and Laser diodes, nanotechnology, superconductivity and plasma studies, waveguide manufacture, failure analysis, and CVD of materials ranging from dielectrics to diamond films.

Recent introductions to the product mix include the MPS-450-RIE/CVD™ as well as the new bench-top TT-150-RIE/CVD family. Now, 2016 ushers in two new product families to the versatile AGSP line of plasma processors: Korvus Hex PVD and Relyon plasma’s Atmospheric Plasma Torches.

This versatile parallel plate plasma tool was based on the very successful design once built by Ion & Plasma Equipment. It remains the most rugged, reliable, and low cost plasma system you can buy. AGS offers the Modular Process System™ , or MPS™, for solving any of your plasma processing requirements with even greater reliability and the best uptime in the industry.

These affordable plasma systems are now available in the following configurations:

Plasma Systems

Home

Company Info

Contact Us

Products

 

Support

Related Links

MPS-XX0-PVD — Physical Vapor Deposition tool

 

Using our standard MPS platform, this Inductively Coupled Plasma (ICP) tool can be helpful where high etch rates and low damage are required. AGS utilizes a compact, self contained, economical HDP plasma source.

                                                                                                 More Details

MPS-XX0-HDP — High Density Plasma tool

 

Advanced systems for use with toxic or corrosive gases or when contamination must be eliminated from your process.

                                                                                                 More Details

MPS-XX0L-Loadlock — Toxic/Corrosive compatible

 

The versatile multi-chamber cluster tool for all of today's most demanding process.

                                                                                                 More Details

MPS-XX0PL-Plasma Locus™— Cluster tool versions of our RIE, PECVD, PVD, and HDP tools

MPS-150-CVD

 

MPS-200L-RIE

 

MPS-300L-RIE OEM

 

MPS-XX0-RIE — Reactive Ion Etcher

 

The classic, high performance, value priced, RIE plasma tool used throughout the world for over ten years - and still going strong.

                                                                                                 More Details

MPS-XX0-PECVDPlasma Enhanced Deposition tool

 

A versatile multi-process PECVD tool with flexible controls and excellent uniformity - all for low price.

                                                                                                 More Details

TT-150-RIE/CVD Bench Top Plasma Tool

 

Reliable bench top model for laboratory research.

                                                                                                 More Details

TT-150-RIE/CVD

 

A research PVD tool with flexible controls and versatile configuration options.

                                                                                                 More Details