Service Note No: 02
To: RIE/CVD maintenance techs
Subject: Leak Checking Procedure on TSG/IPE-1000 systems with PC5000 controllers
Problem: A manual leak checking procedure is necessary in order to check the leak-up rate of the System 1000 vacuum chamber. This is due to the "single valve" design of the system which places the turbo pump as part of the chamber. Since the turbo also has a bearing purge, a large fixed leak is always present into the chamber.
Solution: The following procedure was developed to properly leak check the process chamber accurately.
PROCEDURE: (Start with chamber vented)
Figure 1: Leak Rate versus Time
Preventive maintenance: Wipe chamber seal daily. Check base pressure weekly, Check leak rate monthly, Perform a major PM at least once per year.
Note: Performing regular cleans and PM's keeps the system leak tight and clean.
Expert Tips: Vacuum systems always leak. The question is how much of a leak will actually interfere with the desired process. In general, ashing is forgiving and dielectric etching is more tolerant than metal or III-V etching processes. In PECVD the refractive index will change as a result of a leak.
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Last update made on: 6 September, 2002 by Webmaster