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3064 Kenneth Street

Santa Clara, CA  95054

To contact us:

Phone: 408-855-8686

Email: info@agsplasma.com

AGS Plasma Systems, Inc.

Plasma Locus Product Detail

Our newest addition to the MPS family is a natural evolution to the line. Many of our customers had moved their MPS tools from R&D into production. They wanted a true production tool with greater throughput. Following our design ethic of integrating the best OEM components onto the MPS platform, we chose a 200 or 300mm transfer station as the center of the "locus". This allows you to choose up to 3 standard MPS process modules according to your process needs. Mix and match to double or triple capacity.

Product Summary

MPS-Plasma Locus Features

Modular Design for Ease of Maintenance

1 to 3 Process Chambers

Batch or Single Substrate

Small Foot Print

Stainless Steel or Aluminum Process Chambers

Cost Effective Process Solution

Automatic Process Controller using Windows®

MPS-XX0PL available in 50-150, 200, & 300 mm versions

Single wafer or a variety of cassette load locks are available.

The MPS series is also available as an OEM module to integrate to existing system platforms.

The versatile multi-chamber cluster tool for all of today's most demanding process. The MPS-X00-Locus allows you to tailor a cluster tool to your exacting requirements - without breaking the bank

Multiple chambers for different processes or chemistries

Configure for any RIE, ICP, or PECVD application

Etch metal, poly, Si trench, refractory silicides, III-V features, GaAs backside vias, or Deposit ILD's

Deposit SiO2, SiNx, Amorphous Si, Oxynitride and carbon films, passivation and ILD films for III-V and HTSC compounds

Multilayer processing without breaking vacuum

Excellent for corrosive or hazardous chemistries

Safely reduces particulate contamination

Eliminates water vapor and other contaminants

Safe, rugged design means high reliability with remarkable uptime. Easy to use and simple to service

Delivery: 90 days ARO
Warranty: 1 year parts & labor
Installation: Start up & training are available with the system
Service: Extended warranty &  PM's can be included

MPS-XX0PL —  Cluster Tool

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