AGS Plasma Systems, Inc.

Online Troubleshooting Guide

To help our Semi-Group/IPE/PME/1700 users, we provide an online trouble-shooting guide to let you diagnose most common problems your system.

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Directions: Read the items in the following list. The list is presented in a top down order. Start your troubleshooting at the first item and go to the last. The goal is to verify that the system hardware is OK by running the standard test plasma. At each new question, click on the link to help you isolate the trouble to a particular module:

Trouble-shooting flow diagram

• Is all power to subsystems on? NO - Check AC Dist.
• Will chamber go up and down? NO - Check Chamber
• Can system pump below 150mT? NO - Check Vacuum
• Is pressure/flow stable? NO - Check Gas Control System
• Is test plasma normal? NO - Check RF System
• Does process end correctly? NO - Check System Control
• Is Process within spec? NO - Check Process Parameters
• Is there something else wrong? YES - Miscellaneous Questions

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Main Power or electrical

Check the following items in this order:

1. Facilities AC at power panel
2. EMO circuit (24VAC, key lock switch, reset button)
3. Circuit Breakers (on power distribution & back of some modules)
4. Fuses (on hoist controller & back of some modules)
5. Door & panel switches
6. Interlocks (AC, panels, Atm/Vac)

• Power should now be on so Return to Index

If POWER problem still exists, please try the following:

• Goto - Frequently Asked Questions
• Request assistance from the AGS Support desk

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Chamber Hoist

If the process chamber will not go up, check the following:

1. Is chamber vented (is there a small gap at the base plate)?
2. Is the vent N2 pressure OK?
3. Is atmosphere switch true?
4. Are the hoist chain and gears OK?
5. Check hoist relays and front panel switches
6. Is the hoist motor plugged in?
7. Is the hoist 110Vac power on?
8. Is the system controller (24Vdc) power on?
9. Check hoist limit switches
10. Check hoist power supply rectifier

• Hoist should be working now so Return to Index

If HOIST problem still exists, please try the following:

• Goto - Frequently Asked Questions
• Request assistance from the AGS Support desk

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Vacuum subsystems

If the system will not pump down to 150mT, check the following:

1. Pumps OK?
2. Are the system and exhaust valve controllers on (+/-15Vdc)?
3. Manometer OK?
4. Is chamber down (is there a gap at the base plate)?
5. Valves OK?
6. Leak check system
7. Check for leaks across isolation valve seats (gases/N2)
8. Does the pressure go down when you turn off the H20?

• Chamber should pump below 150mT now so Return to Index

If VACUUM problem still exists, please try the following:

• Goto - Frequently Asked Questions
• Request assistance from the AGS Support desk

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Gas subsystems

If the gas flow or pressure is not stable, check the following:

1. Compressed air set to 80 psi?
2. Regulators set to 15psi? (less for liquid sources: SiCl4,SF6,BCl3)
3. Gas Sources OK & not empty?
4. Isolation, Manometer, Throttle Valves working?
5. Are exhaust valve controller settings normal?
6. MFC's (zero, stability, control) See also: MFC trouble guide

• Gas flow and pressure control should be OK now so Return to Index

If GAS problem still exists, please try the following:

• Goto - Frequently Asked Questions
• Request assistance from the AGS Support desk

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RF sources

Run Standard test plasma and check the following:

1. RF Power Supply settings normal (in auto, remotes on, etc.)
2. Interlocks OK? (Doors, Vacuum Switch, Temp, etc.)
3. Tuner settings normal (in auto, remotes on, etc.)
4. Debris shorting electrode to dark space shield?
5. RF & electrical connections OK?
6. Electrical or RF Shorts around Tuner or Electrode?
7. Cooling Water flow OK & impedance >500k ohm
8. Electrodes coated, dirty, or damaged?

• Standard test plasma should be OK now so Return to Index

If RF problem still exists, please try the following:

• Goto - Frequently Asked Questions
• Request assistance from the AGS Support desk

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System Controller

If the process is not running or ending correctly, check the following:

1. Verify that stored recipe parameter values are as expected
2. Check Endpoint detector operation or settings
3. Review historical data and run process calibration tests
4. Inspect Substrate batches for dissimilarities
5. Inspect for Contamination (internal & external)
6. Review Operating procedures

• System hardware should now be OK so Return to Index

If CONTROL problem still exists, process or substrate adjustments are required. Also, please try the following:

• Goto - Frequently Asked Questions
• Request assistance from the AGS Support desk

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Process Questions

If the process is not running or ending correctly, check the following:

1. No online help is available for this topic yet
2. Request assistance from the AGS Support desk

• Process should now be optimized so Return to Index

If PROCESS is still not acceptable, please try the following:

• Goto - Frequently Asked Questions
• Request assistance from the AGS Support desk

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Miscellaneous Questions

1. No online help is available for this topic yet
2. Request assistance from the AGS Support desk

• Return to Index

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Standard Test Recipes

Use these "standard" recipes for test plasma (optimized for 50mm gap setting):

• RIE (with RF, 13.56mHz power supply)
• ROUGH=150mT, VENT=0.1sec, TEMP=0 degrees
• THROT= 100mT
• GASx = 50 sccm (use O2 or N2 if available)
• RF = 300 watts
• Result should be a stable, uniform plasma, with 500+/-50 Vdc bias (in O2) and reflected power below 5% if all subsystem are OK.

• PECVD (with RF, 13.56mHz power supply)
• ROUGH=150mT, VENT=0.1sec, TEMP=100 degrees
• THROT= 300mT
• GASx = 50 sccm (use N2 or O2 if available)
• RF = 60 watts
• Result should be a stable, uniform plasma, and reflected power below 5% and temperature +/-5deg if all subsystem are OK

Return to Index or Continue to check RF Systems

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Have a question or your own idea for a improving the diagram?
Let us know at the AGS Support desk

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System 1700, APC-1000, & PlasmOps are trademarks of AGS Plasma.
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Prices and specifications subject to change without notice.
Last update made on: 6 September, 2004 by Webmaster