AGS Plasma Systems, Inc. 
Transforming Technology into Affordable Solutions
Plasma Systems
FAMILY OF PLASMA PROCESSORS
SYSTEM 1700
NEW! The MPS Series™ plasma modules have been added to the line.
In 1994, a partnership was formed to make the new SYSTEM 1700-PLASMA available worldwide. This versatile parallel plate plasma tool was based on the very successful design once built by Ion & Plasma Equipment, Inc., it remains the most rugged, and reliable, low cost plasma system you can buy. AGS now offers the Modular Process System, or MPS, for solving any of your plasma processing requirements with even greater reliability and the best uptime in the industry.
New, low cost, batch systems for R&D and production. RIE, Triode, PECVD, or ICP/HDP configurations are available based on an innovative modular plasma platform. The SYSTEM 1700 is aimed at solving the low-volume research, development, and analytical user's needs. Our System 900™ was introduced to meet the unique demands of 2-6" compound semiconductor manufacturing. The AGS Visor™ bench top plasma decapping system using downstream technology. Our new MPS Series high performance plasma tool is used in a variety of demanding applications. The MPS is also available as an OEM module. These systems are being used today for semiconductor research and manufacturing, MEMS, LED's and Laser diodes, superconductivity and plasma studies, waveguide manufacture, failure analysis, and CVD of materials ranging from dielectrics to diamond films.
This low cost plasma system is now available in the following configurations:
(click on the model for more technical details)
- MPS-RIE...................................... Reactive Ion Etcher
- MPS-PECVD............................... Plasma Enhanced Deposition tool
- MPS-PVD.................................... Physical Vapor Deposition tool
- MPS-HDP.................................... High Density Plasma tool
- MPS-LOADLOCK...................... Toxic/Corrosive compatible
- System 1700-PLASMA................ Plasma Etcher
- System 1700-RESEARCH............ Dual chamber research testbed
- PLASMA LOCUS™................... Cluster tool versions
Extraordinary capability - Excellent value
"A whole new plasma system"
For more information:
Contact us directly at:
AGS Plasma Systems, Inc.
Santa Clara, CA 95054 USA
TEL: 408-855-8686
Please send your questions, comments, or suggestions to the AGS Sales desk
or, Submit a Literature Request
Copyright 1991-2014 AGS Plasma - All Rights Reserved
System 1700/900, Visor, MPS Series, APC-2000, & PlasmOps are trademarks of AGS Plasma.
Other trademarks are the property of their respective owners.
Prices and specifications are subject to change without notice.
Last update made on: 4/10/14 by Webmaster