To help our Semi-Group/IPE/PME/1700 users, we provide quick service notes to give you important information about how to maximize uptime on your system.
SN10 - MFC
Service Note No: 14
To: Maintenance staff
Subject: Replacing gas cylinders
Problem: When using reactive or toxic gases
Solution: By following
Preventive maintenance: Check MFC zero weekly, Check bottle pressure every 2 weeks, Check MFC operation monthly
Note: Do not try to check or adjust MFC zero if the MFC has been used in the last hour. There is always a residual zero drift after usage that will diminish with time.
Expert Tips: Do not leave unused gas lines under vacuum. Small leaks are always present and if the line is not pressurized air and moisture will contaminate the line. We recommend cycle purging with dry N2 and leaving idle lines under pressure to prevent vacuum based contamination.
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Last update made on: 6 September, 2002 by Webmaster