AGS
Plasma Systems, Inc. 
System 1700 - PLASMA
Batch loaded, Parallel plate
The reliable, modular, high performance plasma etching tool with the low price.
Features
The System 1700-PLASMA is a basic plasma tool which can be configured in Plasma or RIE modes. Excellent in the lab, it has also seen a lot of action in production areas.
- Apply power to upper or lower electrodes
- SiO2, SiNx, TiW, GaAs, resist, ILD and polyimide, micromachining (MEMS), photonics, and HTSC's
- Accepts any size substrate from 1" to 12" wafers, flat panels, or custom packages
- Easy to use and simple to service
- Safe, rugged design means high reliability with remarkable uptime
- Simple 5 piece chamber construction is versatile and easy to upgrade
- Multi-use process kit with virtually no process memory effect
Delivery
Delivery: 90 days ARO
Warranty: 1 year parts & labor
Installation: Start up & training are included with the system
Service: 1 year of quarterly PM's are included with each system
Extraordinary capability -
Excellent value
"A whole new plasma system"
For more information:
Please send your questions, comments, or suggestions to the AGS Sales desk
Copyright 1991-2004 AGS Plasma - All Rights Reserved
System 1700, APC-1000, & PlasmOps are trademarks of AGS Plasma.
Other trademarks are the property of their respective owners.
Prices and specifications subject to change without notice.
Last update made on: 6 September, 2004 by Webmaster