AGS Plasma Systems, Inc.


 

System 1700 - ECR

Image not availableHigh Density Plasma

Using our standard 1700 platform, this Electon Cyclotron Resonance plasma tool can be helpful where high etch rates and low damage are required.

S17-ECR Features


High density tools offer the ability to produce a very reactive plasma with less radiation exposure to your substrate. Higher etch (or deposition) rates and lower processing temperatures are just two of the benefits of HDP's. Our ECR system utilizes our basic RIE (or PECVD) platform and simply bolts on one of the commercially available ECR sources on the market today. Normally used for etching, it is also available in a deposition version and either are field retrofitable.


S17-ECR Delivery

Delivery: 90 days ARO
Warranty: 1 year parts & labor
Installation: Start up & training are included with the system
Service: 1 year of quarterly PM's are included with each system

Extraordinary capability - Excellent value
"A whole new plasma system"


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Copyright 1991-2004 AGS Plasma - All Rights Reserved
System 1700, APC-1000, & PlasmOps are trademarks of AGS Plasma.
Other trademarks are the property of their respective owners.
Prices and specifications subject to change without notice.
Last update made on: 6 September, 2004 by Webmaster