AGS Plasma Systems, Inc.

Annual PM Service Description

RIE/CVD LOADLOCK SYSTEMS
MAJOR PREVENTIVE MAINTENANCE SERVICE

AGS Plasma provides regular preventive maintenance services for all types of plasma systems. This service can be purchased by contacting AGS Plasma and specifying which type of system the maintenance is intended for.

This Preventive Maintenance service call is intended for customers who have run their system for a while without performing much maintenance on it and want to be sure the system will continue to operate dependably. Plasma system users are taking a proactive stance with regard to maintenance. Statistical Process Control analysis has shown that it is far more economical to perform PM's on a scheduled downtime basis than to wait for a failure to occur, and then to scramble to get a service person in to fix the system. The PM service provides for a 3-4 day service call to perform preventive maintenance, calibration and checkout in order to keep the system up and running in top shape resulting in maximum up-time.

The services performed during the Major PM include:

• Site inspection and system performance survey
• Disassembly, cleaning and rebuilding of process chamber
• Removing, cleaning and rebuilding upper & lower electrodes
• Disassembly, cleaning and rebuilding of transfer mechanism
• Replacement of O-ring vacuum and water seals
• Inspection and replacement of worn or damaged RF components
• Inspection and replacement of leaky or damaged vacuum lines
• Inspection and adjustment of hoist assemblies
• Turbo pump inspection and oil/grease change, if required
• Cryo pump inspection, regeneration, and controller tune up
• Vacuum valve inspection, cleaning and lubrication
• Inspection and adjustment of mechanical vacuum pump
• Drain, recharge and adjust water recirculating system
• I/O system calibration for peak operating performance
• Vacuum leak and performance checks
• Review and assesment of logbooks and maintenance records
• On site training on operation and maintenance
• Complete plasma testing and performance survey

Charges for the service are between $4680-$6240, depending on how long the service call takes (3-4 days) and any discounts that may apply. Travel time and travel expense will be added to the final cost (travel expenses are billed as incurred and verified by receipts). Parts for the call are not included with the above. The Service Engineer carries a complete consumables kit is and the cost of these parts can be included with the job. The system must be in reasonable working order prior to the service engineer's arrival, or labor charges for corrective maintenance (at regular rates) may be added to the final invoice.

There are many cost-effective support solutions available from AGS Plasma.
Call today for details about how we can help you!

For more information:

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Or contact us directly at:
AGS Plasma Systems, Inc.
3064 Kenneth Street
Santa Clara, CA 95054   USA
TEL: 408-855-8686

Please send your questions, comments, or suggestions to the AGS Service desk

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System 1700, APC-1000, & PlasmOps are trademarks of AGS Plasma.
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Prices and specifications subject to change without notice.
Last update made on: 6 September, 2014 by Webmaster