AGS - MPS Series

AGS Plasma Systems, Inc.

Transforming Technology into Affordable Solutions

MPS Series - Plasma Etching & Deposition Platform

High performance, plasma tool used in a variety of demanding applications

The new Modular Process System offers the ultimate machine for thin film research and development.

Advanced Reactor technologies, such as HDP, RIE, PECVD, RIE/PE, and PVD are available as standard modules.

Manual load or a variety of vacuum load locks are available.

The MPS series is available as an OEM module to integrate to existing system platforms.

MPS Series - Features

• Modular Design for Ease of Maintenance

• Single or Dual Chamber

• Batch or Single Substrate

• Small Foot Print

• Stainless Steel or Aluminum Process Chambers

• Cost Effective Process Solution

• Automatic Process Controller using Windows®

Extraordinary capability - Excellent value
"A whole new plasma system"

For more information:

Please send your questions, comments, or suggestions to the AGS Sales desk

or, Submit a Literature Request

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Copyright 1991-2014 AGS Plasma - All Rights Reserved
System 1700/900, Visor, MPS Series, APC-2000, & PlasmOps are trademarks of AGS Plasma.
Other trademarks are the property of their respective owners.
Prices and specifications are subject to change without notice.
Last update made on: 8/9/2014 by Webmaster