AGS
Plasma Systems, Inc. 
MPS-X00PL - Plasma Locus
Cluster
tool
The versatile multichamber cluster tool for all of today's most demanding process.
MPS PLASMA LOCUS Features
Our newest addition to the MPS family is a natural evolution to the line. Many of our customers had moved their MPS tools from R&D into production. They wanted a true production tool with greater throughput. Following our design ethic of integrating the best OEM components onto the MPS platform, we chose a 200 or 300mm transfer station as the center of the "locus". This allows you to choose up to 3 standard MPS process modules according to your process needs. Mix and match to double or triple capacity. The MPS-X00-LOCUS allows you to tailor a cluster tool to your exacting requirements - without breaking the bank.
- Multiple chambers for different processes or chemistries
- Configure for any RIE, ECR, or PECVD application
- Multilayer processing without breaking vacuum
- Etch metals, poly, Si trench, refractory silicides, SiO2, SiNx, TiW, GaAs, resist, ILD and polyimide, III-V features, GaAs backside vias, micromachining (MEMS), photonics, or HTSC's
- Deposit SiO2, SiNx, Amorphous Si, Oxynitride and carbon films, or low temperature passivation and ILD films for III-V and HTSC compounds
- 300mm cassette loader station available
- Excellent for corrosive or hazardous chemistries
- Eliminates water vapor and other contaminants
- Will process any size or shape substrate up to 300mm including flat panels or custom packages
- Wide range of analytical tools for monitoring and controlling
- Easy to use and simple to service
- Safe, rugged design means high reliability with remarkable uptime
MPS-X00-LOCUS Delivery
Delivery: 90 days ARO
Warranty: 1-year parts & labor
Installation: Start up & training are included
with the system
Service: 1 year of quarterly PM's can be included with each system
Extraordinary capability -
Excellent value
"A whole new plasma system"
For more information:
Copyright 1991-2008 AGS Plasma - All Rights Reserved
MPS, System 1700, APC-2000, & PlasmOps are trademarks of AGS Plasma.
Other trademarks are the property of their respective owners.
Prices and specifications subject to change without notice.
Last update made on: 6 September, 2008 by Webmaster