3064 Kenneth Street

Santa Clara, CA  95054

To contact us:

Phone: 408-855-8686

Email: info@agsplasma.com

AGS Plasma Systems, Inc.

Etch Product Detail

The classic, high performance, value priced, RIE plasma tool used throughout the world for over ten years - and still going strong!

This system is your best bet when you have a variety of demanding applications.

The MPS-RIE is great for day-to-day use at the push of a button.

Product Summary

MPS-RIE Features

  • Modular Design for Ease of Maintenance
  • Single or Dual Chamber
  • Batch or Single Substrate
  • Small Foot Print
  • Stainless Steel or Aluminum Process Chambers
  • Cost Effective Process Solution
  • Automatic Process Controller using Windows®
  • MPS-XX0-RIE available in 50-150, 200, & 300 mm versions
  • Manual load or a variety of vacuum load locks are available.

  • The MPS series is also available as an OEM module to integrate to existing system platforms.

· Best built R&D or low volume production tool available

· Si, SiO2, SiNx, Metals, TiW, GaAs, resist, ILD and polyimide, micromachining (MEMS), photonics, HTSC's, and for failure analysis

· Accepts any size substrate from 1" to 12" wafers, flat panels, or custom packages

· Easy to use and simple to service

· Safe, rugged design means high reliability with remarkable uptime

· Simple 5 piece chamber construction is versatile and easy to upgrade

  • Multi-use process kit with virtually no process memory effect
  • Advanced Reactor technologies, such as RIE, RIE/PE, and ICP are available as standard modules.

Delivery: 90 days ARO
Warranty: 1 year parts & labor
Installation: Start up & training are available with the system
Service: Extended warranty &  PM's can be included

MPS-200-RIE —  Reactive Ion Etcher

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