AGS Plasma Systems, Inc.

Transforming Technology into Affordable Solutions

PLASMA • ETCH • PECVD • HDP • IBE • CLUSTER

AGS Plasma Systems, Inc. is the preeminent manufacturer of affordable vacuum plasma systems used for etching and deposition of patterns needed in the microelectronics and optoelectronics industries. The company was formed in 1991 to assist people with their plasma system's parts and service needs. We sell and service plasma systems and have designed and installed a variety of product enhancements. We also supply a Windows/PC process tool controller to add the ease and flexibility of GUI automation to your existing vacuum systems. We offer a complete line of vacuum systems for all your dry processing needs.

Now Celebrating Our 21st Year!
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Come See Us at NCCAVS 2013!   

NCCAVS 34th Annual Vacuum Equipment Exhibition

February 21, 2013

Holiday Inn San Jose Airport, San Jose, California

 

Come See Us at SEMICON West 2013 – Booth 611!  

July 10-12, 2013

Moscone Center, San Francisco, California

 

AGS Plasma is Expanding!

We are currently looking for new sales reps in the North American region. For information, please contact: sales@agsplasma.com

AGS Plasma Headline News:

San Jose, CA — AGS Plasma Systems released the following late breaking news today.

 

AGS announces new bench top research systems

At Semicon West 2012, a new table top reactor, the TT-150-RIE/CVD™, was unveiled by AGS Plasma Systems. The economical new system for Reactive Ion Etch and Plasma Enhanced CVD applications is perfect for the needs of researchers throughout the world. The modular TT-150 is well suited for 2-6" semiconductor, MEMS, TFT, and PV work. “We have designed a really solid bench top reactor based on our MPS-150 platform,” said Russ Coppes, Senior Engineer, AGS Plasma. The system is immediately available with a number of enhancement options.

 

Prestigious Russian Academy of Sciences awards ICP systems order

AGS Plasma Systems has been award an order for their MPS-150-ICP/RIE™ platform for ICP-Reactive Ion Etch applications by the prestigious Russian Academy of Sciences. The modular MPS-150 is well suited to meet the unique demands of 2-6" compound semiconductor research. “It is thrilling to be working with the caliber of scientists at the RAS and we are very proud,” said Allen Guastavino, CEO, AGS Plasma. The system was scheduled to be delivered in mid 2011.

 

AGSP Receives New Orders for ALD Pre-Clean Modules

As the semiconductor capital equipment spending boom surges in 2010, AGS Plasma Systems has received several orders for their MPS-200™ platform for 200 mm Reactive Ion Etch, or RIE, pre-clean applications on an ALD cluster tool. The modular MPS-X00 is an excellent choice for data storage component manufacturing. “These are our first plasma etch systems to be used on a major capital equipment companies atomic layer deposition products. We are excited to see growth for AGSP into this new area,” said Allen Guastavino, CEO, AGS Plasma.

 

AGSP Books Orders During Downturn

In spite of the worldwide recession AGS Plasma Systems continues to book orders for its versatile etch systems. AGSP Director of Sales said today “We are pleased to announce that the University of North Texas in Denton has selected AGSP to supply a two system order for dielectric and metal etching.” UNT choose the MPS-150™ platform for their 100 mm Reactive Ion Etch, or RIE, applications. The modular MPS-150 is well suited to meet the unique demands of 2-6" compound semiconductor manufacturing.

1 - MPS-150L-ICP Metal Etch System

Carbon Nanotechnology Order

AGS Plasma announced that it has received an order for an advanced MPS-150-ICP plasma deposition tool for use in carbon nanotechnology research. A Biotech firm has been working with AGSP for the last year to develop the new technology required to combine plasma and chemical vapor deposition at very high temperatures necessary for the deposition of nanotubes, nanosheets, and graphene. AGSP president and CEO, Allen Guastavino, said, “This is part of our five year plan to be a leader in delivering solutions to the nanotechnology industry. We are excited to be in on the ground floor of commercializing products in this new and growing market.”
            Related link: Next generation nanotechnology computer memory made of graphene

 

New OEM Module Customer

In another story, AGS Plasma revealed that they have signed with another major semiconductor tool supplier to provide OEM versions of their MPS‑300‑RIE and Degas modules. Guastavino said, “This is our second OEM customer for this part of our new business model of delivering turn-key plasma module solutions at very competitive prices. Buying our mature IP facilitates rapid deployment at minimal investment and risk for any OEM that desires to add plasma processing to their portfolio.” AGSP announced that they have already received a follow-on order from the OEM modules from this new customer.

 

University Research Partnerships

Director of Sales added, “We continue to foster relationships at research labs and universities. AGS Plasma recently sold a MPS‑200‑RIE to CalPoly for use in their MEMS materials research lab as a deep Silicon etch tool.” AGSP also continues to work with a variety of universities and in industrial partnerships to develop new applications for plasma technology.

 

Environmental News

Vincent Lanas, AGSP Facilities Coordinator, announced today that AGS Plasma has adopted a Zero Carbon Emissions plan in addition to the company’s ongoing corporate policy of good environmental stewardship. “AGSP has always reduced, reused, and recycled. In 2007 we began an effort to reduce our power usage and we have gained a savings of between 18-29 percent energy savings per month,” Lanas Said. He added that AGSP has implemented a program that renders the company carbon neutral as of July 1, 2008.

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Company Information

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AGS Plasma Systems, Inc.
2681-A Zanker Road
San Jose, CA 95134   USA
TEL: 408-432-9799, FAX: 408-432-9797

Please send your questions, comments, or suggestions to the AGS Sales desk

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Copyright 1991-2012 AGS Plasma - All Rights Reserved
TT-150, MPS Series, System 1700/900, APC-2000, & PlasmOps are trademarks of AGS Plasma.
Other trademarks are the property of their respective owners.
Prices and specifications subject to change without notice.
Last update made on: 11/27/12 by Webmaster

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