Home | About Us | Contact Us | Product List | Service List | Related Links |
3064 Kenneth Street Santa Clara, CA 95054 |
To contact us: |
Phone: 408-855-8686 Email: info@agsplasma.com |
AGS Plasma Systems, Inc. |
AGS Plasma Systems, Inc. |
Transforming Technology into Affordable Solutions |
Plasma Locus Product Detail |
Our newest addition to the MPS family is a natural evolution to the line. Many of our customers had moved their MPS tools from R&D into production. They wanted a true production tool with greater throughput. Following our design ethic of integrating the best OEM components onto the MPS platform, we chose a 200 or 300mm transfer station as the center of the "locus". This allows you to choose up to 3 standard MPS process modules according to your process needs. Mix and match to double or triple capacity. |
Product Summary |
MPS-Plasma Locus Features
|
The versatile multi-chamber cluster tool for all of today's most demanding process. The MPS-X00-Locus allows you to tailor a cluster tool to your exacting requirements - without breaking the bank
|
Delivery: 90 days ARO |
MPS-XX0PL — Cluster Tool |
Home |
Company Info |
Contact Us |
Products
|
Support |
Related Links |