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3064 Kenneth Street Santa Clara, CA 95054 |
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To contact us: |
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Phone: 408-855-8686 Email: info@agsplasma.com |
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AGS Plasma Systems, Inc. |
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AGS Plasma Systems, Inc. |
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Transforming Technology into Affordable Solutions |
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Korvus Technology— The Hex |
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Features List The HEX system’s vacuum chamber consists of a six faceted aluminum frame, which makes the system lightweight, while at the same time providing a rigid structure. The frame supports 6 interchangeable panels, which can be easily swapped around to achieve the desired system configuration. Adding or moving the deposition instruments where necessary. system hires7 no bkgd
Due to the unique flange design the side panels may serve as either a chamber wall (blank panel), viewport panel, deposition source panel, PLD instrument panel or QCM panel (more options are available upon request).
The modular nature of the HEX Series’ design mean that the panels can be mounted onto the frame in a matter of minutes, all water and gas connections are Hamlet quick connects and both sample stage and components are attached using wing nuts, all of which saves a considerable amount of time when performing maintenance procedures and reconfiguring the system.
The base HEX model comes with an 80 l/s turbo pump enabling a base pressure of 8 x 10-7mbar and can be upgraded to a 300l/s pump achieving a base vacuum of 4 x 10-7mbar in under half an hour. The standard HEX system allows for samples of up to 100mm, with a multi sample holder included in order for many smaller samples to be mounted at one time, the larger HEX-L chamber will accommodate samples up to 150mm. The HEX deposition system will fit perfectly on a lab bench, making it ideal for small scale teaching laboratories or clean rooms where the available space is limited. |
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Hex Series |
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Product SummaryFeatures· Description · SYSTEM APPLICATIONS Due to the versatility and flexibility of the HEX series, the systems are ideal for may research, and training applications. The modular system design allows it to be reconfigured in minutes and ensures that it can be used for a variety of applications with the minimum of effort.
TYPICAL APPLICATIONS •Sample preparation •R & D development of new coatings •Electrical contacts •Sputter deposition •Teaching and training •Lift-off
Delivery: 90 days ARO |